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Determination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microring

dc.contributor.authorHoste, Jan-Willem
dc.contributor.authorDe Geest, Bruno
dc.contributor.authorBienstman, Peter
dc.date.accessioned2021-10-22T19:44:50Z
dc.date.available2021-10-22T19:44:50Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25394
dc.sourceIIOimport
dc.titleDetermination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microring
dc.typeProceedings paper
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage93281F
dc.source.conferenceImaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues XIII
dc.source.conferencedate7/02/2015
dc.source.conferencelocationSan Francisco , CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2204235
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9328


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