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SAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applications

dc.contributor.authorHou, Lin
dc.contributor.authorDerakhshandeh, Jaber
dc.contributor.authorArmini, Silvia
dc.contributor.authorGerets, Carine
dc.contributor.authorDe Preter, Inge
dc.contributor.authorRebibis, Kenneth June
dc.contributor.authorMiller, Andy
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-22T19:45:10Z
dc.date.available2021-10-22T19:45:10Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25395
dc.sourceIIOimport
dc.titleSAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applications
dc.typeProceedings paper
dc.contributor.imecauthorHou, Lin
dc.contributor.imecauthorDerakhshandeh, Jaber
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorGerets, Carine
dc.contributor.imecauthorDe Preter, Inge
dc.contributor.imecauthorRebibis, Kenneth June
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecDerakhshandeh, Jaber::0000-0003-2448-9165
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.conference32nd Advanced Metallization Conference - AMC
dc.source.conferencedate9/09/2015
dc.source.conferencelocationAustin, TX USA
dc.identifier.urlhttp://www.advancedmetallizationconference.com/agenda.html
imec.availabilityPublished - imec


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