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MBE growth of BaTiO3 on Ge/Si and SrTiO3/Si pseudosubstrates for electro-optical modulators integration on silicon

dc.contributor.authorHsu, Mark
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorMerckling, Clement
dc.contributor.authorEl Kazzi, Salim
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-22T19:45:26Z
dc.date.available2021-10-22T19:45:26Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25396
dc.sourceIIOimport
dc.titleMBE growth of BaTiO3 on Ge/Si and SrTiO3/Si pseudosubstrates for electro-optical modulators integration on silicon
dc.typeMeeting abstract
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.source.peerreviewno
dc.source.beginpageM-IX
dc.source.conferenceE-MRS Spring Meeting Symp. M: Multifunctional Binary and Complex Oxides Films and Nanostructures for Nanoelectronics and ... II
dc.source.conferencedate11/05/2015
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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