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Collaborative work on reducing the intersite gaps in outgassing qualification

dc.contributor.authorInoue, Soichi
dc.contributor.authorShiobara, Eishi
dc.contributor.authorSasami, Takeshi
dc.contributor.authorTakagi, Isamu
dc.contributor.authorKikuchi, Yukiko
dc.contributor.authorFujimori, Toru
dc.contributor.authorMinegishi, Shinya
dc.contributor.authorBerg, Robert
dc.contributor.authorLucatorto, Thomas
dc.contributor.authorHill, Shannon
dc.contributor.authorTanio, Charles
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLin, Yen-Chih
dc.contributor.authorFan, Yu-Jen
dc.contributor.authorAshworth, Dominic
dc.date.accessioned2021-10-22T19:51:26Z
dc.date.available2021-10-22T19:51:26Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25417
dc.sourceIIOimport
dc.titleCollaborative work on reducing the intersite gaps in outgassing qualification
dc.typeProceedings paper
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage942212
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography VI
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, Ca USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207813
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9422


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