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Self-heating on bulk FinFET from 14nm down to 7nm node

dc.contributor.authorJang, Doyoung
dc.contributor.authorBury, Erik
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorChiarella, Thomas
dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorMocuta, Anda
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T19:53:13Z
dc.date.available2021-10-22T19:53:13Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25423
dc.sourceIIOimport
dc.titleSelf-heating on bulk FinFET from 14nm down to 7nm node
dc.typeProceedings paper
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage289
dc.source.endpage292
dc.source.conferenceIEEE Interantional Electron Devices Meeting - IEDM
dc.source.conferencedate7/12/2015
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - imec


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