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Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner

dc.contributor.authorJonckheere, Rik
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorTakagi, Noriaki
dc.contributor.authorWatanabe, Hidehiro
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-22T19:57:33Z
dc.date.available2021-10-22T19:57:33Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25438
dc.sourceIIOimport
dc.titleCorrelation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner
dc.typeProceedings paper
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage942216
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography VI
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207817
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9422


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