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Stress management techniques for GaN growth on 200mm silicon wafers for High power applications
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Authors
Kandaswamy, Prem Kumar
;
Liang, Hu
;
Novak, Tomas
;
Zhao, Ming
;
Saripalli, Yoga
Conference
18th International Workshop on Physics of Semiconductor Devices - IWPSD
Title
Stress management techniques for GaN growth on 200mm silicon wafers for High power applications
Publication type
Proceedings paper
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