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Advanced ultralow-k organosilicate glasses: NEXAFS study

dc.contributor.authorKonashuk, A.
dc.contributor.authorFilatova, E.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorRedzheb, Murad
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T20:11:02Z
dc.date.available2021-10-22T20:11:02Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25482
dc.sourceIIOimport
dc.titleAdvanced ultralow-k organosilicate glasses: NEXAFS study
dc.typeMeeting abstract
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorKrishtab, Mikhail
dc.source.peerreviewyes
dc.source.beginpageVI-0-05
dc.source.conference16th International Conference on X-ray Absorption Fine Structure - XAFS 16
dc.source.conferencedate23/08/2015
dc.source.conferencelocationKarlsruhe Germany
imec.availabilityPublished - imec


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