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Impact of template residues on electrical properties of spin-on ultra low-k dielectrics

dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T20:13:42Z
dc.date.available2021-10-22T20:13:42Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25490
dc.sourceIIOimport
dc.titleImpact of template residues on electrical properties of spin-on ultra low-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage6.2
dc.source.conference46th IEEE Semiconductor Interface Specialists Conference - SISC
dc.source.conferencedate2/12/2015
dc.source.conferencelocationArlington, VA USA
dc.identifier.urlhttp://www.ieeesisc.org/programs/2015_SISC_technical_program.pdf
imec.availabilityPublished - imec


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