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Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorVanstreels, Kris
dc.contributor.authorSavage, Travis
dc.contributor.authorMatsunaga, Koichi
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T20:14:18Z
dc.date.available2021-10-22T20:14:18Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25492
dc.sourceIIOimport
dc.titleImprovement of cohesion strength in ULK OSG materials by pore structure adjustment
dc.typeJournal article
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage75
dc.source.endpage78
dc.source.journalMicroelectronic Engineering
dc.source.volume137
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931715000908
imec.availabilityPublished - open access


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