Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

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Authors
Krishtab, Mikhail; Vanstreels, Kris; Savage, Travis; Matsunaga, Koichi; De Gendt, Stefan; Baklanov, Mikhaïl
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
137
Title
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Publication type
Journal article
Embargo date
9999-12-31
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