Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Publication:
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Date
2015
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
29909.pdf
723.96 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Krishtab, Mikhail
;
Vanstreels, Kris
;
Savage, Travis
;
Matsunaga, Koichi
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1876
since deposited on 2021-10-22
419
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1876
since deposited on 2021-10-22
419
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations