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Characterization of patterned porous dielectrics after plasma patterning and subsequent wet processing

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorDecoster, Stefan
dc.contributor.authorChan, BT
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T20:23:52Z
dc.date.available2021-10-22T20:23:52Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25523
dc.sourceIIOimport
dc.titleCharacterization of patterned porous dielectrics after plasma patterning and subsequent wet processing
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceAVS 62nd International Symposium and Exhibition
dc.source.conferencedate18/10/2015
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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