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Process simplification and improvement of rear side of IBC cells by means of PECVD SiOx and epitaxy

dc.contributor.authorLi, Yuandong
dc.contributor.authorRecaman Payo, Maria
dc.contributor.authorZielinski, Bartosz
dc.contributor.authorDebucquoy, Maarten
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-22T20:35:20Z
dc.date.available2021-10-22T20:35:20Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25558
dc.sourceIIOimport
dc.titleProcess simplification and improvement of rear side of IBC cells by means of PECVD SiOx and epitaxy
dc.typeProceedings paper
dc.contributor.imecauthorLi, Yuandong
dc.contributor.imecauthorRecaman Payo, Maria
dc.contributor.imecauthorDebucquoy, Maarten
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecDebucquoy, Maarten::0000-0001-5980-188X
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage466
dc.source.endpage469
dc.source.conference31st European Photovoltaic Solar Energy Conference and Exhibition - EUPVSEC
dc.source.conferencedate14/09/2015
dc.source.conferencelocationHamburg Germany
dc.identifier.urlhttp://www.eupvsec-proceedings.com/proceedings?paper=34761
imec.availabilityPublished - imec


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