Modeling EUV mask using alternative materials for mask 3D effect compensation

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Authors
Luong, Vu; Philipsen, Vicky; Verduijn, Erik; Scholze, Frank; Hendrickx, Eric; Heyns, Marc; Wood, Obert
Conference
International Symposium on Extreme Ultraviolet Lithography - EUVL
Title
Modeling EUV mask using alternative materials for mask 3D effect compensation
Publication type
Proceedings paper
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