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Maintaining Moore's law: enabling cost-friendly dimensional scaling

dc.contributor.authorMallik, Arindam
dc.contributor.authorRyckaert, Julien
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorRonse, Kurt
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T20:50:04Z
dc.date.available2021-10-22T20:50:04Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25602
dc.sourceIIOimport
dc.titleMaintaining Moore's law: enabling cost-friendly dimensional scaling
dc.typeProceedings paper
dc.contributor.imecauthorMallik, Arindam
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.source.peerreviewyes
dc.source.beginpage94221N
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography VI
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.url10.1117/12.2086085
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9422


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