Authors

Mao, Shengping; Zhong, Kuo; Rochus, Veronique; Severi, Simone; Nauwelaers, Bart; Tilmans, Harrie; Rottenberg, Xavier

Conference

18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS

Title

Capacitive micromachined ultrasonic transducers for acoustic manipulation

Publication type

Proceedings paper

Embargo date

9999-12-31