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Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

dc.contributor.authorMarinov, Daniil
dc.contributor.authorEl Otell, Ziad
dc.contributor.authorBowden, Mark
dc.contributor.authorBraithwaite, Nicholas
dc.date.accessioned2021-10-22T20:55:42Z
dc.date.available2021-10-22T20:55:42Z
dc.date.issued2015
dc.identifier.issn0963-0252
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25618
dc.sourceIIOimport
dc.titleExtraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
dc.typeJournal article
dc.contributor.imecauthorEl Otell, Ziad
dc.source.peerreviewyes
dc.source.beginpage65008
dc.source.journalPlasma Sources Science and Technology
dc.source.issue6
dc.source.volume24
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/0963-0252/24/6/065008
imec.availabilityPublished - imec


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