Line Edge Roughness on Directed Self Assembly: Impact of process conditions

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Authors
MKuppuswamy, Vijaya Kumar; Williamson, Lance; Pathangi Sriraman, Hari; Seidel, Robert; Gronheid, Roel; Nealey, Paul; Lin, Guanyang; Cao, Yi
Conference
SPIE Advance Lithography 2015
Title
Line Edge Roughness on Directed Self Assembly: Impact of process conditions
Publication type
Meeting abstract
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