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Spatial ALD for 3D thin-film batteries

dc.contributor.authorMoitzheim, Sebastien
dc.date.accessioned2021-10-22T21:11:43Z
dc.date.available2021-10-22T21:11:43Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25661
dc.sourceIIOimport
dc.titleSpatial ALD for 3D thin-film batteries
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceWorkshop on ALD for Batteries
dc.source.conferencedate15/09/2015
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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