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Dual-gate self-aligned a-IGZO TFTs using 5-mask steps

dc.contributor.authorNag, Manoj
dc.contributor.authorDe Roose, Florian
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorMyny, Kris
dc.contributor.authorKumar, Abhishek
dc.contributor.authorSteudel, Soeren
dc.contributor.authorGenoe, Jan
dc.contributor.authorDehaene, Wim
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.date.accessioned2021-10-22T21:19:27Z
dc.date.available2021-10-22T21:19:27Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25682
dc.sourceIIOimport
dc.titleDual-gate self-aligned a-IGZO TFTs using 5-mask steps
dc.typeProceedings paper
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorDe Roose, Florian
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorDehaene, Wim
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecDe Roose, Florian::0000-0003-4490-5007
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.source.peerreviewyes
dc.source.beginpageAMD5-4
dc.source.conference23rd International Display Workshops - IDW
dc.source.conferencedate9/12/2015
dc.source.conferencelocationOtsu Japan
dc.identifier.urlhttps://www.idw.or.jp/timetable/AMD.html
imec.availabilityPublished - imec


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