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Cross-sectional imaging of directed self-assembly block copolymers

dc.contributor.authorOkabe, Kye
dc.contributor.authorYi, He
dc.contributor.authorTung, Maryann C
dc.contributor.authorTiberio, Richard
dc.contributor.authorBekaert, Joost
dc.contributor.authorGronheid, Roel
dc.contributor.authorWong, H.S. Philip
dc.date.accessioned2021-10-22T21:25:59Z
dc.date.available2021-10-22T21:25:59Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25699
dc.sourceIIOimport
dc.titleCross-sectional imaging of directed self-assembly block copolymers
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage942318
dc.source.conferenceAlternative Lithographic Technologies VII
dc.source.conferencedate23/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210772
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9423


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