An optimized poly-buffered LOCOS process for a 0.35 µm CMOS technology

Thumbnail
View/open
Metadata
Show full item record
Authors
Mieville, Jean-Paul; Rooyackers, Rita; Deferm, Ludo
Conference
24th European Solid State Device Research Conference - ESSDERC
Title
An optimized poly-buffered LOCOS process for a 0.35 µm CMOS technology
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections