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Metrology for evaluating elastic and fracture properties of porous low dielectric constant materials

dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-22T21:26:20Z
dc.date.available2021-10-22T21:26:20Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25700
dc.sourceIIOimport
dc.titleMetrology for evaluating elastic and fracture properties of porous low dielectric constant materials
dc.typeMeeting abstract
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceNanobrucken: a Nanomechanical Testing Workshop & Hysitron User Meeting
dc.source.conferencedate21/04/2015
dc.source.conferencelocationPotsdam Germany
imec.availabilityPublished - imec


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