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Ozone based processing: impact on high efficiency Interdigitated back contact solar cells

dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorHaslinger, Michael
dc.contributor.authorSingh, Sukhvinder
dc.contributor.authorBearda, Twan
dc.contributor.authorDebucquoy, Maarten
dc.contributor.authorSzlufcik, Jozef
dc.date.accessioned2021-10-22T21:31:45Z
dc.date.available2021-10-22T21:31:45Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25714
dc.sourceIIOimport
dc.titleOzone based processing: impact on high efficiency Interdigitated back contact solar cells
dc.typeProceedings paper
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorSingh, Sukhvinder
dc.contributor.imecauthorDebucquoy, Maarten
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecSingh, Sukhvinder::0000-0003-1985-0534
dc.contributor.orcidimecDebucquoy, Maarten::0000-0001-5980-188X
dc.identifier.doi10.4028/www.scientific.net/SSP.219.312
dc.source.peerreviewyes
dc.source.beginpage312
dc.source.endpage316
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XII -UCPSS XII
dc.source.conferencedate22/09/2014
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena; Vol. 219


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