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Wet defect etching for defect reveal in epitaxial Ge

dc.contributor.authorPacco, Antoine
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCaymax, Matty
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Keyzer, Ellen
dc.date.accessioned2021-10-22T21:34:10Z
dc.date.available2021-10-22T21:34:10Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25720
dc.sourceIIOimport
dc.titleWet defect etching for defect reveal in epitaxial Ge
dc.typeOral presentation
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference28th International Conference on Defects in Semiconductors - ICDS
dc.source.conferencedate27/07/2015
dc.source.conferencelocationEspoo Finland
dc.identifier.urlhttp://icds-2015.org/wp-content/uploads/sites/7/2015/07/Posters-program_ICDS-2015.pdf
imec.availabilityPublished - imec


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