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Technology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node

dc.contributor.authorPan, Chenyun
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorDebacker, Peter
dc.contributor.authorCatthoor, Francky
dc.contributor.authorCollaert, Nadine
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVerkest, Diederik
dc.contributor.authorThean, Aaron
dc.contributor.authorNaeemi, Azad
dc.date.accessioned2021-10-22T21:38:18Z
dc.date.available2021-10-22T21:38:18Z
dc.date.issued2015
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25731
dc.sourceIIOimport
dc.titleTechnology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node
dc.typeJournal article
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorCatthoor, Francky
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecCatthoor, Francky::0000-0002-3599-8515
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3125
dc.source.endpage3132
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue10
dc.source.volume62
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7181691
imec.availabilityPublished - open access


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