Authors

Pan, Chenyun; Raghavan, Praveen; Yakimets, Dmitry; Debacker, Peter; Catthoor, Francky; Collaert, Nadine; Tokei, Zsolt; Verkest, Diederik; Thean, Aaron; Naeemi, Azad

ISSN

0018-9383

Issue

10

Journal

IEEE Transactions on Electron Devices

Volume

62

Title

Technology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node

Publication type

Journal article

Embargo date

9999-12-31