Publication:

Technology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node

Date

2015
Journal article
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dc.contributor.authorPan, Chenyun
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorDebacker, Peter
dc.contributor.authorCatthoor, Francky
dc.contributor.authorCollaert, Nadine
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVerkest, Diederik
dc.contributor.authorThean, Aaron
dc.contributor.authorNaeemi, Azad
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorCatthoor, Francky
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecCatthoor, Francky::0000-0002-3599-8515
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-22T21:38:18Z
dc.date.available2021-10-22T21:38:18Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25731
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7181691
dc.source.beginpage3125
dc.source.endpage3132
dc.source.issue10
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume62
dc.title

Technology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node

dc.typeJournal article
dspace.entity.typePublication
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