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Technology/system codesign and benchmarking for lateral and vertical GAA nanowire FETs at 5-nm technology node

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1947 since deposited on 2021-10-22
2last month
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Acq. date: 2026-04-29

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1947 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-04-29

Citations