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Towards cost-effective and low defectivity DSA flows for line/space patterning

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorMallik, Arindam
dc.contributor.authorChan, BT
dc.contributor.authorVaid, Varun
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorLi, Jin
dc.contributor.authorHong, Sung Eun
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T21:43:20Z
dc.date.available2021-10-22T21:43:20Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25743
dc.sourceIIOimport
dc.titleTowards cost-effective and low defectivity DSA flows for line/space patterning
dc.typeProceedings paper
dc.contributor.imecauthorMallik, Arindam
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate25/10/2015
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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