The use of eDR-71xx for DSA defect review and automated classification

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Authors
Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Bayana, Hareen; Bouckou, Loemba; Brown, Jim; Parisi, Paolo; Gosain, Rohan
Conference
Metrology, Inspection, and Process Control for Microlithography XXIX
Title
The use of eDR-71xx for DSA defect review and automated classification
Publication type
Proceedings paper
Embargo date
9999-12-31
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