Atomic layer deposition of ruthenium on ruthenium surfaces: a theoretical study

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Authors

Phung, Quan; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Christine; Delabie, Annelies

ISSN

1932-7447

Issue

12

Journal

Journal of Physical Chemistry C

Volume

119

Title

Atomic layer deposition of ruthenium on ruthenium surfaces: a theoretical study

Publication type

Journal article

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