Ru/STO/Ru DRAM MIM capacitors by atomic layer deposition
dc.contributor.author | Popovici, Mihaela Ioana | |
dc.date.accessioned | 2021-10-22T21:54:07Z | |
dc.date.available | 2021-10-22T21:54:07Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25770 | |
dc.source | IIOimport | |
dc.title | Ru/STO/Ru DRAM MIM capacitors by atomic layer deposition | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.source.peerreview | no | |
dc.source.conference | Namlab Novel High k Application Workshop | |
dc.source.conferencedate | 10/03/2015 | |
dc.source.conferencelocation | Dresden Germany | |
imec.availability | Published - imec |
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