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Ru/STO/Ru DRAM MIM capacitors by atomic layer deposition

dc.contributor.authorPopovici, Mihaela Ioana
dc.date.accessioned2021-10-22T21:54:07Z
dc.date.available2021-10-22T21:54:07Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25770
dc.sourceIIOimport
dc.titleRu/STO/Ru DRAM MIM capacitors by atomic layer deposition
dc.typeOral presentation
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.source.peerreviewno
dc.source.conferenceNamlab Novel High k Application Workshop
dc.source.conferencedate10/03/2015
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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