Show simple item record

Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorvan den Berg, J.A.
dc.contributor.authorDouhard, Bastien
dc.contributor.authorSwerts, Johan
dc.contributor.authorBailey, P.
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroven, Benjamin
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorConard, Thierry
dc.contributor.authorMoussa, Alain
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorDelabie, Annelies
dc.contributor.authorFazan, Pierre
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-22T21:54:39Z
dc.date.available2021-10-22T21:54:39Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25771
dc.sourceIIOimport
dc.titleUnderstanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage108
dc.source.endpage112
dc.source.journalMicroelectronic Engineering
dc.source.volume147
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931715003019
imec.availabilityPublished - imec
imec.internalnotesINFOS 2015 paper


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record