Authors

Popovici, Mihaela Ioana; Redolfi, Augusto; Aoulaiche, Marc; van den Berg, J.A.; Douhard, Bastien; Swerts, Johan; Bailey, P.; Kaczer, Ben; Groven, Benjamin; Meersschaut, Johan; Conard, Thierry; Moussa, Alain; Adelmann, Christoph; Delabie, Annelies; Fazan, Pierre; Van Elshocht, Sven; Jurczak, Gosia

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

147

Title

Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

Publication type

Journal article