Publication:
Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
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1923 since deposited on 2021-10-22
2last month
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Acq. date: 2026-08-07
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Statistics
Views
1923 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-08-07
Citations