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Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
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1917 since deposited on 2021-10-22
Acq. date: 2025-12-10
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Views
1917 since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations