Show simple item record

dc.contributor.authorProfijt, Harald
dc.contributor.authorSuhard, Samuel
dc.contributor.authorRosseel, Erik
dc.contributor.authorTolle, John
dc.contributor.authorMertens, Hans
dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorWeeks, Doran
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorLoo, Roger
dc.contributor.authorMehta, Sandeep
dc.contributor.authorMaes, Jan
dc.date.accessioned2021-10-22T21:56:38Z
dc.date.available2021-10-22T21:56:38Z
dc.date.issued2015-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25776
dc.sourceIIOimport
dc.titleLow-temperature pre-epitaxy surface cleaning of Si and SiGe
dc.typeMeeting abstract
dc.contributor.imecauthorSuhard, Samuel
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage143
dc.source.endpage144
dc.source.conference9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9
dc.source.conferencedate17/05/2015
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record