dc.contributor.author | Gao, Teng | |
dc.contributor.author | Coenegrachts, Bart | |
dc.contributor.author | Waeterloos, Joost | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Meynen, Herman | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-09-30T11:58:42Z | |
dc.date.available | 2021-09-30T11:58:42Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2579 | |
dc.source | IIOimport | |
dc.title | Integration of unlanded via in a non-etchback SOG direct-on-metal approach in 0.25 micron CMOS process | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Coenegrachts, Bart | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Maex, Karen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 45 | |
dc.source.endpage | 47 | |
dc.source.conference | Proceedings of the IEEE 1998 International Interconnect Technology Conference - IITC | |
dc.source.conferencedate | 1/06/1998 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - open access | |