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Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating

dc.contributor.authorRamezani, Maliheh
dc.contributor.authorSeveri, Simone
dc.contributor.authorMoussa, Alain
dc.contributor.authorOsman, Haris
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-22T22:07:06Z
dc.date.available2021-10-22T22:07:06Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25800
dc.sourceIIOimport
dc.titleContact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating
dc.typeProceedings paper
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage576
dc.source.endpage579
dc.source.conference18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate21/06/2015
dc.source.conferencelocationAnchorage, AL USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7180989
imec.availabilityPublished - open access


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