dc.contributor.author | Ramezani, Maliheh | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Osman, Haris | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-22T22:07:06Z | |
dc.date.available | 2021-10-22T22:07:06Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25800 | |
dc.source | IIOimport | |
dc.title | Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Osman, Haris | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 576 | |
dc.source.endpage | 579 | |
dc.source.conference | 18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS | |
dc.source.conferencedate | 21/06/2015 | |
dc.source.conferencelocation | Anchorage, AL USA | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7180989 | |
imec.availability | Published - open access | |