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Detailed analysis of transport properties of FinFETs through Y-function method: effects of substrate orientation and strain
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Authors
Ribeiro, Thales
;
Simoen, Eddy
;
Claeys, Cor
;
Martino, Joao
;
Pavanello, Marcelo
Conference
30th Symposium on Microelectronics Technology and Devices - SBMICRO
Title
Detailed analysis of transport properties of FinFETs through Y-function method: effects of substrate orientation and strain
Publication type
Proceedings paper
Embargo date
9999-12-31
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