Publication:

Electrical verification of contact holes obtained with DSA of BCP

Date

2015

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Rincon Delgadillo, Paulina

;

;

Vandenbroeck, Nadia

;

;

;

van der Veen, Marleen

;

Vandersmissen, Kevin

;

Boemmels, Juergen

;

Statistics

1949 since deposited on 2021-10-22

Acq. date: 2026-02-26