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Towards electrical verification of contact holes obtained with DSA of BCP

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorBekaert, Joost
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorGronheid, Roel
dc.contributor.authorChan, BT
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorLuong, Vinh
dc.date.accessioned2021-10-22T22:16:43Z
dc.date.available2021-10-22T22:16:43Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25823
dc.sourceIIOimport
dc.titleTowards electrical verification of contact holes obtained with DSA of BCP
dc.typeOral presentation
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.conferenceInternational Microprocesses and Nanotechnology Conference
dc.source.conferencedate10/11/2015
dc.source.conferencelocationToyama Japan
imec.availabilityPublished - imec


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