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Fast analytical design of poly-SiGe MEMS pressure sensors

dc.contributor.authorRochus, Veronique
dc.contributor.authorWang, Bo
dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-22T22:19:15Z
dc.date.available2021-10-22T22:19:15Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25829
dc.sourceIIOimport
dc.titleFast analytical design of poly-SiGe MEMS pressure sensors
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRottenberg, Xavier
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conference16th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate20/04/2015
dc.source.conferencelocationBudapest Hungary
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7103163
imec.availabilityPublished - open access


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