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MEMS design and modeling

dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-22T22:24:02Z
dc.date.available2021-10-22T22:24:02Z
dc.date.issued2015-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25840
dc.sourceIIOimport
dc.titleMEMS design and modeling
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.source.peerreviewyes
dc.source.conferenceModeling and Simulation of Microsystems - Microtech
dc.source.conferencedate14/06/2015
dc.source.conferencelocationWashington DC USA
imec.availabilityPublished - imec


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