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In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

dc.contributor.authorSawada, Ken
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorMori, Shigetaka
dc.contributor.authorCherman, Vladimir
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorFukuzaki, Yuzo
dc.contributor.authorAmmo, Hiroaki
dc.date.accessioned2021-10-22T22:35:09Z
dc.date.available2021-10-22T22:35:09Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25866
dc.sourceIIOimport
dc.titleIn-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit
dc.typeProceedings paper
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage145
dc.source.endpage149
dc.source.conferenceInternational Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate23/03/2015
dc.source.conferencelocationTempe, AZ USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7106126
imec.availabilityPublished - imec


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