Authors

Sayan, Safak; Tao, Zheng; Chan, BT; De Simone, Danilo; Kuwahara, Yuhei; Nafus, Kathleen; Leeson, Michael J.; Gstrein, Florian; Singh, Arjun; Vandenberghe, Geert

Conference

Advances in Patterning Materials and Processes XXXII

Title

Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigation

Publication type

Proceedings paper