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Advanced metrology for beyond silicon semiconductor device structures

dc.contributor.authorSchulze, Andreas
dc.contributor.authorLoo, Roger
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorGachet, David
dc.contributor.authorBerney, Jean
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-22T22:40:42Z
dc.date.available2021-10-22T22:40:42Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25879
dc.sourceIIOimport
dc.titleAdvanced metrology for beyond silicon semiconductor device structures
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage220
dc.source.endpage223
dc.source.conferenceFrontiers of Characterization and Metrology for Nanoelectronics - FCMN
dc.source.conferencedate14/04/2015
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttps://www.nist.gov/sites/default/files/documents/pml/div683/conference/FCMN_CD.pdf
imec.availabilityPublished - open access


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