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The role of guide stripe chemistry in block copolymer directed self assembly

dc.contributor.authorSeidel, Robert
dc.contributor.authorWilliamson, Lance
dc.contributor.authorHer, YoungJun
dc.contributor.authorKim, Jihoon
dc.contributor.authorLin, Guanyang
dc.contributor.authorNealey, Paul
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T22:43:11Z
dc.date.available2021-10-22T22:43:11Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25885
dc.sourceIIOimport
dc.titleThe role of guide stripe chemistry in block copolymer directed self assembly
dc.typeProceedings paper
dc.contributor.imecauthorHer, YoungJun
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94250W
dc.source.conferenceAdvances in Patterning Materials and Processes XXXII
dc.source.conferencedate22/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2235470
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9425


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