Reverse replication of circular micro grating structures with soft lithography

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Authors
Shang, Xiaobing; Missinne, Jeroen; Teigell Beneitez, Nuria; Jablonski, Michal; De Smet, Jelle; Joshi, Pankaj; Cuypers, Dieter; Baghdasaryan, T.; Vervaeke, Michael; Thienpont, Hugo; De Smet, Herbert
Conference
31st European Mask and Lithography Conference
Title
Reverse replication of circular micro grating structures with soft lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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